OUR PRODUCTS

MFM-50

MFM Mass Flow Meter Explosion-proof

MFM-500 series mass flow meter are specially designed for high accuracy measurement of gas flow rate which adopts advanced industrial flow sensor chip and aero aluminum flow channel. Combined with Xinnovis calibration and compensation calculation method, MFM-500 can realize high precision measurement of clean, dry and non-corrosive gas. The accuracy is 1.5 % at or less than 200 SLPM and 1.5 % above 200 SLPM and turndown ratio is better than 100: 1. The flow range of this series is from 0.2SCCM to 8 0 0 SLM (other flow ranges are available for customized consultation). With large LCD display, digital and analog output, MFM-500 can be applied in indoor and remote test. The products are low cost, easy to install and no need of additional thermal and pressure compensation.

MFC-UT

MFC-UT integrated Compact Mass Flow Meter with Aluminum Gas Seat

MFC-UT (Mass Flow Controller) series products are integrated and compact, which are based on the advanced industrial flow sensor chip, combined with high-speed digital processing technology and intelligent compensation algorithm. This series product constructed with high-end electromagnetic proportional valve, aviation aluminum alloy gas seat, high accuracy microelectromechanical chips. Compared with traditional mass flow controller, MFC-UT products are with integrated designing, which make the product greatly compact and can be installed in small space and portable devices. This series products are better suitable for limit space installation devices.

MFC-E series

MFC-E Mass Flow Controller Economic-cost and Smart

MFC-E (Mass Flow Controller) series products are specially developed for gas analyzer, mass spectrometer, gas distributor and other industries. The product mainly constructed with high accuracy flow sensor, high-end electromagnetic proportional valve, 316 L stainless steel gas seat. MFC-E series are with high accuracy, quick reaction and outstanding stability. Also easy operation, no need for temperature compensation, insensitive to pressure. Input and control signal includes: 0-5 V analog signal and R S 4 8 5 communication formula.

MFC-S500

MFC-S500 high pricision& stability

MFC-S500 digital mass flow controllers are developed with advanced industrial flow sensor chip (with patent), combined with low gas loss circuit structure, high accuracy digital control circuit and algorithm. This digital mass flow meter can achieve high accuracy, high stability and wide range controlling ratio in a wide temperature range. MFC-S500 constructed with digital screen and independent power supply interface, perfect for semiconductor, vacuum coating, photovoltaic and other applications.

OUR ADVANTAGE

Committed to the development and promotion of high-end gas measurement and control sensors and microsystem technology

High-Tech Companies

A high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales

Professional Product

Focus on the research and development, manufacturing and sales of industrial-grade gas flow sensor chips, high-end gas mass flow meters (MFM) and other gas flow measurement and control chips and modules.

Strategic Cooperation

The company has established long-term strategic cooperative relations with the Institute of Microelectronics of the Singapore Science and Technology Agency, the Shanghai Institute of Micro-Technology Industry and other units

Strict Control

With ISO9001, ISO14001, IATF16949 and other quality management and manufacturing certification.

ABOUT US

Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.

2014 Year
Qingdao Xinnovis Microsystem Technology Co., Ltd. was established in 2014.

9000 ㎡
Through joint strategic partners, it has the world's first-class sensor wafer manufacturing capabilities, and has a 9,000-square-meter packaging and testing workshop.