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MFM-500 series mass flow meter are specially designed for high accuracy measurement of gas flow rate which adopts advanced industrial flow sensor chip and aero aluminum flow channel. Combined with Xinnovis calibration and compensation calculation method, MFM-500 can realize high precision measurement of clean, dry and non-corrosive gas. The accuracy is 1.5 % at or less than 200 SLPM and 1.5 % above 200 SLPM and turndown ratio is better than 100: 1. The flow range of this series is from 0.2SCCM to 8 0 0 SLM (other flow ranges are available for customized consultation). With large LCD display, digital and analog output, MFM-500 can be applied in indoor and remote test. The products are low cost, easy to install and no need of additional thermal and pressure compensation.
MFC-UT (Mass Flow Controller) series products are integrated and compact, which are based on the advanced industrial flow sensor chip, combined with high-speed digital processing technology and intelligent compensation algorithm. This series product constructed with high-end electromagnetic proportional valve, aviation aluminum alloy gas seat, high accuracy microelectromechanical chips. Compared with traditional mass flow controller, MFC-UT products are with integrated designing, which make the product greatly compact and can be installed in small space and portable devices. This series products are better suitable for limit space installation devices.
MFC-E (Mass Flow Controller) series products are specially developed for gas analyzer, mass spectrometer, gas distributor and other industries. The product mainly constructed with high accuracy flow sensor, high-end electromagnetic proportional valve, 316 L stainless steel gas seat. MFC-E series are with high accuracy, quick reaction and outstanding stability. Also easy operation, no need for temperature compensation, insensitive to pressure. Input and control signal includes: 0-5 V analog signal and R S 4 8 5 communication formula.
MFC-S500 digital mass flow controllers are developed with advanced industrial flow sensor chip (with patent), combined with low gas loss circuit structure, high accuracy digital control circuit and algorithm. This digital mass flow meter can achieve high accuracy, high stability and wide range controlling ratio in a wide temperature range. MFC-S500 constructed with digital screen and independent power supply interface, perfect for semiconductor, vacuum coating, photovoltaic and other applications.
OUR ADVANTAGE
我们的优势
致力于高端气体测控传感器与微系统技术开发和推广
高科技企业
一家专业从事工业智能传感器芯片设计、模组开发，以及高端计量仪表研发、制造和销售于一体的高科技企业
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专业的产品
专注于工业级气体流量传感器芯片、高端气体质量流量计（MFM）等气体流量测控芯片和模组的研发、制造和销售。
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战略合作
公司与新加坡科技局微电子研究院、上海微技术工业研究院等单位建立长期战略合作关系
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严格管控
具 有ISO9001、ISO14001、IATF16949等品质管理和制造认证。
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ABOUT US
关于我们
青岛芯笙微纳电子科技有限公司是一家专业从事工业智能传感器芯片设计、模组开发，以及高端计量仪表研发、制造和销售于一体的高科技企业。公司位于青岛市崂山区青岛国际创新园，毗邻山东大学（青岛校区）、中国海洋大学、北航微电子研究院、中科院兰化所（青岛）、青岛大学等著名学府。公司创始团队成员来自海外传感器知名研究机构和专业仪器仪表公司，在传感器芯片设计、计量仪表开发方面具有丰富经验。公司与新加坡科技局微电子研究院、上海微技术工业研究院等单位建立长期战略合作关系，与山东大学和北航微电子研究院具有密切合作关系。
青岛芯笙微纳电子科技有限公司成立于2014年。
通过联合战略合作伙伴，具备全球一流的传感器晶圆制造能力，并拥有9000平米封装和测试车间
致力于高端气体测控传感器与微系统技术开发和推广
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Qingdao Xinnovis Microsystem Technology Co., Ltd.
Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.
CONTACT US
TEL: 400 006 6550
E-mail：service@xinnovis.com
ADDRESS: B2-1, 12th Floor, Block B, International Innovation Park, No. 169 Songling Road, Laoshan District, Qingdao
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