MFA Mass Flow Sensor
- Details description
- 商品名称: MFA Mass Flow Sensor
- 商品编号: MFA-40
- mass flow sensors
- MEMS flow sensor chip
Caution: Power supply shall not exceed the specified operating voltage range, otherwise the product will be permanently damaged!
100SCCM, 1SLPM (or customized)
φ6mm quick coupler (default)
Aluminum alloy, FR4, sealing FKM
Note: Unless otherwise stated, this product is calibrated by N2, at 25℃ temperature, and 2bar differential pressure, and mounted horizontally.
空气质量监测系列分析仪(CO /O /SO 等)，一般采用紫外、红外线的吸收或者荧光法对进样气体 进行实时检测，采样气体的流量和压力控制精度，将影响分析结果。
青岛芯笙MFA系列小体积、经济型气体流量模块，采用航空铝合金外壳设计，耐压达到1MPa， 灵敏度漂移低、可靠性高，并具有模拟（线性）和数字（I C）两种输出模式，方便客户使用，响应时间最快5ms，有利于客户结合采样气泵实现流量快速稳定。
MFM-500 series mass flow meter are specially designed for high accuracy measurement of gas flow rate which adopts advanced industrial flow sensor chip and aero aluminum flow channel. Combined with Xinnovis calibration and compensation calculation method, MFM-500 can realize high precision measurement of clean, dry and non-corrosive gas. The accuracy is 1.5 % at or less than 200 SLPM and 1.5 % above 200 SLPM and turndown ratio is better than 100: 1. The flow range of this series is from 0.2SCCM to 8 0 0 SLM (other flow ranges are available for customized consultation). With large LCD display, digital and analog output, MFM-500 can be applied in indoor and remote test. The products are low cost, easy to install and no need of additional thermal and pressure compensation.
MFC-UT (Mass Flow Controller) series products are integrated and compact, which are based on the advanced industrial flow sensor chip, combined with high-speed digital processing technology and intelligent compensation algorithm. This series product constructed with high-end electromagnetic proportional valve, aviation aluminum alloy gas seat, high accuracy microelectromechanical chips. Compared with traditional mass flow controller, MFC-UT products are with integrated designing, which make the product greatly compact and can be installed in small space and portable devices. This series products are better suitable for limit space installation devices.
MFC-E (Mass Flow Controller) series products are specially developed for gas analyzer, mass spectrometer, gas distributor and other industries. The product mainly constructed with high accuracy flow sensor, high-end electromagnetic proportional valve, 316 L stainless steel gas seat. MFC-E series are with high accuracy, quick reaction and outstanding stability. Also easy operation, no need for temperature compensation, insensitive to pressure. Input and control signal includes: 0-5 V analog signal and R S 4 8 5 communication formula.
MFC-S500 digital mass flow controllers are developed with advanced industrial flow sensor chip (with patent), combined with low gas loss circuit structure, high accuracy digital control circuit and algorithm. This digital mass flow meter can achieve high accuracy, high stability and wide range controlling ratio in a wide temperature range. MFC-S500 constructed with digital screen and independent power supply interface, perfect for semiconductor, vacuum coating, photovoltaic and other applications.
Qingdao Xinnovis Microsystem Technology Co., Ltd.
Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.