New Breakthrough! Qingdao Xinnovis Company Receives Funding Support from the National Key Research and Development Program
Release time：
09 Jan,2024
Summary
Qingdao Xinnovis Microsystem Technology Co., Ltd., as the leading unit of the project, has received approval from the Ministry of Science and Technology for its application for the National Key Research and Development Program "Micro-range Flow Sensitive Components and Sensors." The project received its first batch of funding in December 2023 and has officially entered the implementation phase. This is the first time Qingdao Xinnovis Microsystem Technology Co., Ltd. has received support for this type of project, signifying the company's official entry into the national team and national recognition of its related technologies.
The National Key Research and Development Program is an integration of the former National Basic Research Program of China (973 Program), the National High-Tech Research and Development Program of China (863 Program), and the National Science and Technology Support Program. It is a series of major scientific research and development plans implemented to meet major national needs, enhance the core competitiveness and independent innovation capabilities of industries, and address current and future technological bottlenecks and prominent issues.
Main Research Content of the Project
In the "Micro-range Flow Sensitive Components and Sensors" project, Qingdao Xinnovis Microsystem Technology Co., Ltd. collaborates with Hanwei Group, Aerospace Science and Technology Corporation 511 Institute, China Electronics Technology Group Corporation 49th Research Institute, and the Institute of Microelectronics, Chinese Academy of Sciences, to tackle key technological challenges. After passing through multiple stages of selection and defense, the project finally received industry expert recognition and approval from the Ministry of Science and Technology. The project addresses the needs of the hydrogen energy and semiconductor industries for micro gas flow detection, developing globally leading "temperature-pressure-flow" integrated flow sensor chips and system integration technologies, achieving a flow meter product with a target range of only 0.2 sccm. The implementation of this project will effectively promote the company's development in flow sensors and flow meters, and improve China's technological level in advanced gas flow measurement and control technology.
Company Profile
Qingdao Xinnovis Microsystem Technology Co., Ltd., located in the International Innovation Park of Laoshan District, Qingdao City, is incubated by Shandong University. The company is a national high-tech enterprise integrating the research, development, production, and sales of high-end gas mass flow meters/controllers (MFCs), thin-film vacuum gauges (Vacuum Transducer), pressure controllers (EPCs), and other core semiconductor components. Through independent innovation and industry-academia-research cooperation, it contributes to the development of China's semiconductor industry. The company currently undertakes the construction of research institutions such as the Qingdao Advanced Gas Flow Measurement and Control Key Laboratory, the Qingdao Intelligent Sensor Engineering Center, and the Qingdao Expert Workstation, and has won titles such as "Specialized, Refined, Special, and New" in Shandong and Qingdao. The founding team members come from overseas renowned sensor research institutions and professional instrument and meter companies, with rich experience in sensor chip design and instrument development. The company has more than 4,000 square meters of cleanroom facilities and has obtained ISO9001, ISO14001, and other system certifications. Related products are widely used in special gas professional fields such as photovoltaics, semiconductors, gas analyzers, brazing/TIG welding, metrology institutes, and laboratories, as well as in civil fields such as building ventilation and automobiles.
2014—2019 Technology Accumulation
2020: 0-250slm flow meter, 0-1slm MFC, miniature digital anemometer
2021: 0-800slm flow meter, 0-10slm MFC, MFM: 50, T series MFC: E, T, UT series
2022: S500 series semiconductor-grade MFC, electronic pressure controller, proportional valve development: 50-500L/min range
2023: Thin-film vacuum gauge, all-metal sealed MFC, S300D gas measurement and control solution system
Piezoelectric proportional valve, high-precision differential pressure MFC, DT500 semiconductor flow meter S70
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