The application of gas mass flow rate in the laboratory industry


2022-05-17 15:14

   Company Profile

Qingdao Xinsheng Micro-Nano Electronic Technology Co., Ltd. is located in Laoshan District, Qingdao City, adjacent to Qingdao Campus of Shandong University, Qingdao Institute of Microelectronics of Beihang University, Qingdao Institute of Energy of Chinese Academy of Sciences and other research institutions, is a high-tech enterprise specializing in the development of high-end gas flow sensors and flow measurement and control instruments, the core members of the company's team from Singapore, Belgium, Chinese Academy of Sciences and other internationally renowned MEMS research institutions. The company has established long-term strategic cooperative relations with the Institute of Microelectronics of the Singapore Science and Technology Bureau, Shanghai Institute of Microtechnology Industry and other units, and has a close cooperation relationship with Shandong University and Beihang Institute of Microelectronics in the development of new sensor chips.

Qingdao Xinsheng Micro-Nano Electronic Technology Co., Ltd. has obtained 39 national invention patents and honorary qualifications

    Qingdao Xinsheng will continue to focus on the field of micro gas flow measurement and control, and is committed to providing customers with high-quality products and professional services, strengthening management based on quality and reputation, and contributing to the development of domestic analytical instruments and semiconductor equipment.

  Fabrication and calibration platforms
  The manufacturing platform has more than 80 sensor automatic production equipment and reliability testing equipment and 9,000 square meters of 1,000-level dust-free sealing and testing workshop, with ISO9001, ISO14001, IATF16949 and other quality management and manufacturing certifications.

In the calibration and calibration process, it has a number of high-end equipment such as piston standard flow device (accuracy 0.3%), sonic nozzle standard flow device (accuracy 0.13%), American Fluke Molbox flow device (accuracy 0.125%), etc., to ensure product accuracy.


Overview: Combined with the country's continuous investment in scientific research, universities, research institutes and other industries in the past two years, there are more and more high-precision gas equipment, gas consumption is also increasing year by year, and the demand for accurate measurement and control of gas flow is also increasing. Based on the unique microelectromechanical system (MEMS), Qingdao Xinsheng has launched a variety of high-performance gas mass flow meters (MFM) and gas mass flow controllers (MFC) products suitable for the laboratory field.



Classification of gases commonly used in laboratories

1. Classification according to use

One is energy, power, and gas. In the laboratory, some gases are used to provide energy, such as natural gas, coal gas, liquefied gas, hydrogen, acetylene, etc., and some are used to provide power, such as compressed air and nitrogen.

The second is the raw materials for testing. Some gases are commonly used as raw materials for experiments, such as chlorine, nitric oxide gas, oxygen, hydrogen, etc., which are used in chemical reaction experiments.

The third is the auxiliary gas of experimental instruments. Some tests or instruments in the laboratory require high-purity shielding gases, such as high-purity non-combustible gases (nitrogen, carbon dioxide), inert gases (helium, argon), flammable gases (hydrogen, acetylene), combustible gases (oxygen), etc., used in gas chromatography, gas chromatography-mass spectrometry, atomic absorption, ICP and other precision instruments.


2. Classification according to chemical properties

One is toxic and harmful gases. It is extremely toxic or corrosive, and can cause poisoning, burns and even death when it invades the human body, such as chlorine, ammonia, etc.

The second is flammable and explosive gases. It has flammability and chemical explosion hazard, such as hydrogen, acetylene, etc., and some flammable and explosive gases also have certain toxicity.

The third is combustible gas. It has the ability to support combustion, but it does not burn itself, and the presence of such gases increases the risk of fire, such as oxygen.

4. Other gases. Gases that do not have the above three properties, such as noble gases, carbon dioxide, etc.




General gas equipment for routine analytical laboratory instruments

  1. Gas chromatography: H2 N2 He Air

  2. Liquid Phase:N2 CDA

  3. Atomic Absorption: Flame Method: Air+C2H2/N20+C2H2 Graphite Furnace Method: Ar+02/Ar+Air

  4. VOC检测:Air   Ar   He

  5. ICP-MS: (N2)  Ar  Air (He)

  6. LC/MS: N2

  7. X-ray fluorescence spectrometer: Ar/CH4 He

  8. Plasma emission spectroscopy: N2 Ar

  9. Elemental analyzer: O2 He

  10. Carbon & Sulfur Analyzer: O2 N2

  11. Mercury meter: Ar Air

  12. Sulfur meter: O2

  13. Calorimeter: O2

  14. Ion mass spectrometry: He ion chromatography: N2

  15. Quadrupole and TFO: He

  16. Bioreactor: Air CO2 O2 N2

  17. Triple quadrupole: N2 H2

  18. Supercritical convergence: CO2

  19. Microwave polymorphic synthesis: N2Ar

  20. NMR instrument: N2 CDA He

  21. Chemical Synthesis: CDA

  22. Pellet Reduction-Expansion Tester: N2 Gas LPG (Larger Flow, Main Pipe at Least 3/8")

  23. Reaction gas for solar cells: Ar N2 He NH3 CF4 N2O H2 SiH4

SiH2CL2, SiH2CL3, SiHCL4, etc



Qingdao Xinsheng MFM-50 series gas mass flow meter is specially designed for high-precision measurement of gas flow. This series of flowmeters adopts the industry's advanced flow sensor chip, combined with the design of aviation aluminum polished gas flow channel, and cooperates with the company's core calibration and compensation algorithm to achieve high-precision flow measurement of various clean, dry and non-corrosive gases. The typical accuracy of the product within 20SLM is 1%, the typical accuracy of 50SLM is 1.5%, and the range ratio is better than 100:1, the range of this series of products is from 100SCCM to 800SLM optional (other ranges can be customized on consultation), and is equipped with LCD screen display, digital and analog output, convenient for users to debug on-site and remotely. The product is low-cost, easy to install, and does not require additional temperature and pressure compensation, making it suitable for inert gas metering in the laboratory industry.


Qingdao Xinnovis Microsystem Technology Co., Ltd.

Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.



TEL: 400 006 6550

Whatsapp:+86 18562590798

ADDRESS: B2-1, 12th Floor, Block B, International Innovation Park, No. 169 Songling Road, Laoshan District, Qingdao

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