DF500 series

High-precision differential pressure flow measurement technology

High-speed piezoelectric ceramic proportional valve

Accuracy is not affected by pressure fluctuations

Complies with SEMI standards, multiple communication options available

Category:

Gas flow measurement and control

Tel:

400 006 6550

Online Consultation

Return to List

Product Specification

User Manual

CAD file

Taobao link

DF500 series

DF500 Series

Product Specifications

Model Classification	DF500 DeviceNet Version, DF500 D/A Version
Range (Nitrogen Equivalent)	(0~50, 100, 200, 500) sccm (0~1, 2, 5) slm Other ranges are available, please consult for details.
Accuracy ¹	±1.0% S.P. (>10% F.S.)
	±0.1% F.S. (≤10% F.S.)
Range Ratio	100:1
Inlet Pressure	240~450 kPa(A)
Operating Pressure Difference	≥240kPa
Outlet Pressure	≤15 kPa(A)
Pressure Accuracy	±7 kPa (0-700 kPa(A)) for digital signal
Temperature Accuracy	±1℃ (0-50℃)
Stability	±1% F.S./year
Repeatability	±0.2% S.P. (>10% F.S.) ±0.02% F.S. (≤10% F.S.)
Response Time ²	≤1s
Internal Leakage	≤0.5% F.S.
External Leakage	≤1.0 × 10-12 Pa m³/s (He)
Maximum Withstanding Pressure	≤1000 kPa(A)
Operating Temperature	0~50℃ (15~45℃ recommended)
Storage Temperature	-20~80℃
Gas Path Material	SUS316Lvv
Valve Status
Supply Voltage	DC24V (≤150mA)
Communication Interface	M12 (five-pin)	DB9M, RJ45 dual network port
Communication Protocol	DeviceNet	RS485
Standard Accessories	1/4 inch VCR, 1.125 inch iGS, others optional
Installation Direction	Installation direction does not affect accuracy

Remarks

1. %S.P. refers to the percentage of error to the setpoint, %F.S. refers to the percentage of error to the full scale. Nitrogen gas is used during testing, and other test conditions meet the requirements of this specification.

2. Response time refers to the time required to reach within ±2% of the setpoint. Nitrogen gas is used during testing at 25°C, and other test conditions meet the requirements of this specification.