S700 series

High-precision flow control

Fast response across the full range

Pressure insensitive characteristics

Range/gas switching function

Built-in display with user-friendly interface

Strict adherence to SEMI standards

Category:

Gas flow measurement and control

Tel:

400 006 6550

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Product Specification

User Manual

CAD file

Taobao link

S700 series

S700 Series

Product Specifications

Model Classification	S700 DeviceNet Version	S700 D/A Version
Range (Nitrogen Equivalent)	(0~10,20,50,100,200,500)Sccm (0~1,2,5,10)slm Other ranges are available, please consult for details.
Accuracy ¹	±1.0%S.P.(>25%F.S.) ±0.25%F.S.(≤25%F.S.)
Range Ratio	50:1
Operating Temperature	0~50℃(15~45℃ recommended)
Storage Temperature	-20~80℃
Response Time ²	≤1s
Linearity	≤±0.5%F.S.
Repeatability	≤±0.2%F.S.
Operating Pressure Difference	50to300kPa
Pressure Fluctuation Compensation	≤±(5.0%S.P.+1.5%F.S.)@5psi/s
External Leakage	≤5.0×10-12Pam3/s(He)
Gas Path Material	SUS316LvV
Valve Default State	Normally Closed
Flow Rate When Valve is Fully Closed Flow Rate When Valve is Fully Closed	≤±1.0%F.S.
Supply Voltage	DC24V±5%
Communication Interface	M12(5 pin)	DB9M, RJ45 dual network ports
Communication Protocol	DeviceNet	RS485
Standard Accessories	1/4inchVCR, 1.125inchiGS, others optional
Installation Direction	Installation direction does not affect accuracy

Remarks

1. %S.P. refers to the percentage of error to the set value, %F.S. refers to the percentage of error to the full scale. Nitrogen is used for testing, and other test conditions meet the requirements of this specification.

2. Response time refers to the time required to reach ±2% of the set value. Nitrogen is used for testing at 25℃, and other test conditions meet the requirements of this specification.