P500 series
• Ultra-small size, suitable for system integration
• Low-cost, economical solution
• High precision, high resolution
• Superior zero-point stability
• Good repeatability
• Ultra-fast response time
P500 series
P500 Series
Product Specifications
| Pressure Control Range | 0-50/100Torr | ||
| Pressure Control Accuracy | ±0.5%FS | ||
| Pressure Control Range | 1-100%FS | ||
| Response Time | ≤ls | ||
| Communication Method | RS485, EtherCAT, DeviceNet | ||
| Pressure Signal Output | 0-10V | ||
| Flow Signal Output | 0-5V | ||
| Inlet Pressure Range | 1.5-3Bar | ||
| Flow Detection Range (Ammonia) | 0-20/50/100sccm (Please consult for others) | ||
| Flow Detection Accuracy | 0-25%FS: <0.3%FS; >25% FS: 1%RD | ||
| Leak Rate (External) | ≤le-12 Pa.m^3/s (Nitrogen) | ||
| Leak Rate (Internal) | <0.1sccm (Nitrogen) | ||
| Supply Voltage | 18-32V (24V recommended) | ||
| Connector Type | 1/4VCR | ||
| Operating Temperature | 15-40℃ |
Communication Connection
DeviceNet version
M12 Definition
| Pin Number | Signal Name |
M12 (5 pins) |
|
| 1 | NC. | ||
| 2 | DC24V | ||
| 3 | GND | ||
| 4 | CanH | ||
| 5 | CanL | ||
Application Areas
Helium cooling system for semiconductor wafers
Liquid source pressure control system
MOCVD vapor pressure control
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