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MFC-S500

MFC-S500 high pricision& stability

PRODUCT OVERVIEW

MFC-S500 digital mass flow controllers are developed with advanced industrial flow sensor chip (with patent), combined with low gas loss circuit structure, high accuracy digital control circuit and algorithm. This digital mass flow meter can achieve high accuracy, high stability and wide range controlling ratio in a wide temperature range. MFC-S500 constructed with digital screen and independent power supply interface, perfect for semiconductor, vacuum coating, photovoltaic and other applications.

Details description
Specifications
Applications

- 商品名称: MFC-S500 high pricision& stability
- 商品编号: MFC-S500
MFC-S500 digital mass flow controllers are developed with advanced industrial flow sensor chip (with patent), combined with low gas loss circuit structure, high accuracy digital control circuit and algorithm. This digital mass flow meter can achieve high accuracy, high stability and wide range controlling ratio in a wide temperature range. MFC-S500 constructed with digital screen and independent power supply interface, perfect for semiconductor, vacuum coating, photovoltaic and other applications.
- Mass flow meter
- MFC
- digital mass flow controllers

Technical specifications
Gas requirements	Clean, dry and no-corrosive gas
Gas	air、N₂、Ar、CO₂,He, H₂,CH₄, O₂ and so on
Flow range	(0～10, 100, 200, 300, 500) SCCM (0～1, 2, 3, 5, 10，20) SLM
Accuracy	0.3%F.S. (≤30%F.S.) 1.0%S.P. (＞0.3%F.S.)
Turndown ratio	100:1
Leak integrity, outboard	1×10-9 Pa m3/s He
Response time	≤0.5S
Repeatability	±0.2%F.S
Max Pressure	9.8 bar
Environment Conditions
Operating temperature	0~50℃
Operating humidity	10%~90%RH（No frozen and condensation）
Operation pressure	≥ 2slpm, 0.5~4 bar ＜ 2slpm , 0.5~6 bar
Storage temperature	-20~85℃
Electrical specifications
Power supply	DC24V, ripple wave≤50mV
Power dissipation	＜4W
Settling time (in control, typical)	<1s
Electrical connection
Interface type	D-SUB9、RJ45
Analog control	0~5V、4~20mA
Digital control	RS485、RS232
Digital code (RS485)
Interface type	D-SUB9、RJ45
Communication rate	4800, 9600, 14400, 19200, 38400, 56000, 57600, 115200(default), 128000, 230400, 256000, 460800, 500000 (can be modified by instruction or host computer)
Modbus	RS485(Default is Modbus-RTU，can be customized)
IP	1(default)~99 (can be modified by instruction or host computer)
Nodes	99
Mechanical parts
Fitting type	Tube: 8mm、12mm、3/8inch VCR：1/4inch (other types can be optional)
Chip material	Silicon, silicon nitride, silicon carbide, etc
Body material	Seat：316L stainless steel Shell：carbon steel
Sealing	FKM
Weight	0.95kg

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S500-SERIES_Datasheet_v4.0

2024-01-03 10:45

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MFC-S500

MFC-S500 high pricision& stability

Qingdao Xinnovis Microsystem Technology Co., Ltd.

Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.