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MFA-40

MFA Mass Flow Sensor

PRODUCT OVERVIEW

MFA-40 series mass flow sensors are with advanced MEMS flow sensor chip, high-speed digital processing circuit, metal or injection molded gas channel. MFA-40 is with highly reliable sensor microsystem module and realize low footprint and quick reaction. The product is based on the high-performance MEMS flow sensor chip independently developed by Xinnovis, with a variety of different flow channel designs, shapes and materials, which can achieve high reliability flow sensor module for wide applications.
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  • Details description
  • Specifications
  • Applications
    • 商品名称: MFA Mass Flow Sensor
    • 商品编号: MFA-40

    MFA-40 series mass flow sensors are with advanced MEMS flow sensor chip, high-speed digital processing circuit, metal or injection molded gas channel. MFA-40 is with highly reliable sensor microsystem module and realize low footprint and quick reaction. The product is based on the high-performance MEMS flow sensor chip independently developed by Xinnovis, with a variety of different flow channel designs, shapes and materials, which can achieve high reliability flow sensor module for wide applications.

    • mass flow sensors
    • MFA
    • MEMS flow sensor chip
  • Caution: Power supply shall not exceed the specified operating voltage range, otherwise the product will be permanently damaged!

     

               100SCCM, 1SLPM (or customized)

    Parameters

    Min Value

    Standard Value

    Max. Value

    Unit

    Operating voltage

    7

    8

    15

    V

    Operating currency

     

    15

     

    mA

    Output impendance

    -

    30

    -

    Analog output

    0.5

     

    4.5

    V

    Zero Voltage

    0.45

    0.5

    0.55

    V

    Accuracy

     

    2.0

     

    %F.S.

    Distinguish ability

     

    0.5

     

    %F.S.

    Repeatability

     

    1.0

     

    %F.S.

    Zero deviation

     

    0.5

     

    %F.S.

    Response time

     

    50

     

    ms

    Operating

    temperature

    0

     

    50

    Storage temperature

    -20

     

    85

    Interface type

    φ6mm quick coupler (default)

    Body material

    Aluminum alloy, FR4, sealing FKM

    Note: Unless otherwise stated, this product is calibrated by N2, at 25℃ temperature, and 2bar differential pressure, and mounted horizontally.


  •    空气质量监测分析仪

    空气质量监测系列分析仪(CO /O /SO 等),一般采用紫外、红外线的吸收或者荧光法对进样气体 进行实时检测,采样气体的流量和压力控制精度,将影响分析结果。

    青岛芯笙MFA系列小体积、经济型气体流量模块,采用航空铝合金外壳设计,耐压达到1MPa, 灵敏度漂移低、可靠性高,并具有模拟(线性)和数字(I C)两种输出模式,方便客户使用,响应时间最快5ms,有利于客户结合采样气泵实现流量快速稳定。


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Qingdao Xinnovis Microsystem Technology Co., Ltd.

Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.

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TEL: 400 006 6550

Whatsapp:+86 18562590798

Email:overseasales@xinnovis.com

E-mail:service@xinnovis.com

ADDRESS: B2-1, 12th Floor, Block B, International Innovation Park, No. 169 Songling Road, Laoshan District, Qingdao

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