Summary of Qingdao Xinnovis Flow Meter Product Field Tests

Release time：

16 Jun,2023

Summary

Qingdao Xinnovis focuses on gas mass flow meters and gas mass flow controllers

Qingdao Xinnovis

Focuses on gas mass flow meters and gas mass flow controllers

Qingdao Xinnovis Microsystem Technology Co., Ltd. possesses complete design, manufacturing, packaging, and testing technologies in gas mass flow meter technology.

Taking the S300 series flow controller products as an example, its characteristics are as follows:

Stable flow control technology:

Gas flow control is achieved based on the flow sensor and proportional valve under the action of the PID control algorithm. The PID algorithm used generally has a dynamic adjustment function, which can adapt to the operating conditions for dynamic adjustment, thereby achieving rapid flow switching and stable flow output. The following figure shows the stability comparison of the maximum flow point of the 10L flow controller. Taking the 10 SLM flow point as an example, the fluctuation of this product is ±8 sccm, and the three competing products are ±13 sccm, ±116 sccm, and ±19.5 sccm respectively. (Data recorded by a third-party MFM, the yellow line represents our company's product)

Figure 1.2 Comparison of fluctuations of three 10L flow controllers at the full-scale point

Research on temperature compensation technology:

Temperature compensation: Large temperature changes will have a slight impact on key components such as sensor sensitivity, circuit system, and gas path structure. Generally, there is about 3% reading error in the range of 0-50℃ (without temperature compensation), as shown in the figure below. Our company's flow meter uses a full-range temperature method for precise temperature compensation to ensure that the temperature drift error within the full range is controlled within 1%.

Figure 1.3 MFC-E10 L flow temperature compensation effect test data

Flow meter pressure drop research:

Flow meter pressure drop is one of the key indicators of the flow meter and is the minimum pressure difference to ensure the normal operation of the flow meter. The flow meter pressure drop generally increases with the increase of the flow rate, and is also affected by the solution. The pressure drop of the thermal flow meter on the chip is much smaller than that of the vortex flow meter and the differential pressure flow meter.