E-P100系列.webp
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EP-100 series

Excellent product stability

High precision, small size

Fast response speed

Good repeatability and reproducibility

High precision work at a wide temperature range and high cost performance

EP-100 series

E-P100 Series

Product Specifications

Basic Parameters

Media Requirements

Clean, dry, and free of corrosive gases

Media Types

Air, nitrogen, oxygen, carbon dioxide, helium, hydrogen, methane, argon, etc.

Range 1
(Nitrogen Equivalent)

(0~10, 20, 50, 100, 200, 500) sccm
(0~1, 2, 5, 10, 20) slm
Other ranges are available, please consult for details

Accuracy

±0.8%F.S. 2 or ±1.0%S.P. 3
Take the larger value

Range Ratio

100:1

Response Time 4

≤1s

Repeatability

≤±0.2%F.S.

Resolution

0.01 sccm, ≤100 sccm
0.1 sccm, ≤1 slm and >100 sccm
1 sccm, ≤5 slm and >1 slm
0.01 slm, >5 slm

Leak Rate

≤1×10-9 Pam³/sHe

Maximum Pressure Resistance

9.8bar

Environmental Conditions

Operating Temperature

0~50℃

Operating Humidity

10%~90%R.H. (No icing, no frost)

Operating Pressure 5

0.5~4 bar, >2 slm
0.5~6 bar, ≤2 slm
(Specific range related)

Storage Temperature

-20~85℃

Electrical Parameters

Supply Voltage

DC24V

Power Consumption

≤2.7W

Start-up Time

≤1s

Communication Interface

Interface Type

D-SUB9

Analog Control

0~5V or 4~20mA

Digital Control

RS485 or RS232

Digital Signal (RS485/RS232)

Interface Type

D-SUB9

Communication Rate

9600 (default), 14400, 19200, 38400, 56000,
57600, 115200
(Can be modified via command or host computer)

Protocol

Modbus-RTU

Device Address

1 (default)~250
(Can be modified via command or host computer)

Mechanical Parameters

Connector Type

Compression fitting: 8mm, 1/4inch, 1/8inch
Other options available

Gas Contact Material

316L stainless steel, fluororubber, silicon dioxide

Main Body Material

Base: 316L stainless steel
Housing: Aluminum alloy (E series); DT4C (E-P100 series)

Sealing Material

FKM fluororubber

Weight

0.90kg

Remarks

● Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25°C, 2.5 bar differential pressure (inlet 3.5 barA, outlet 1 barA), horizontal placement.

● It is recommended to install a straight pipe section of appropriate size at the inlet, otherwise it may cause deviation in accuracy.

● It is recommended to match the largest possible connectors at the inlet and outlet to avoid causing additional pressure loss.

1. The shown range is the selectable range for nitrogen.

2. %F.S. refers to the percentage of error to the full scale.

3. %S.P. refers to the percentage of error to the setpoint.

4. Response time refers to the time required to reach within ±2% of the setpoint.

5. Operating pressure refers to the differential pressure between the inlet and outlet.

Application Areas

Gas distribution instrument

Gas distribution instrument

Analyzer

Analyzer

Vacuum coating

Vacuum coating

Welding

Welding

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