S300 series

Pollution resistance, dust resistance, and corrosion resistance

Easy maintenance, high cost performance, and short delivery time

Category:

Gas flow measurement and control

Tel:

400 006 6550

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Product Specification

User Manual

CAD file

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S300 series

S300 Series

Product Specifications

	Model Classification	S300 EtherCAT Version	S300 D/A Version
Basic Parameters	Media Requirements	Clean and Dry Gas
	Media Types	Air, nitrogen, oxygen, carbon dioxide, hydrogen, methane, ammonia, silane, boron trichloride, chlorine, etc.
	Range ¹ (Nitrogen Equivalent)	(0~10, 20, 50, 100, 200, 500) sccm (0~1, 2, 5, 10, 20, 50) slm (0~100, 200, 400) slm ——For ranges ≥100 slm, an external valve structure is used. ——Other ranges are available, please contact our company for details.
	Accuracy	±0.3%F.S. ² (≤30%F.S.) ——%F.S. refers to the percentage of the error to the full scale. ±1.0%S.P. ³ (>30%F.S.) ——%S.P. refers to the percentage of the error to the setpoint.
	Range Ratio	50:1
	Response Time ⁴	Controller: ≤1s Flow meter: ≤10ms ——Response time refers to the time required to reach the setpoint or the final stable value within ±2%.
	Repeatability	≤±0.2%F.S.
	Resolution	0.01 sccm, ≤100 sccm 1 sccm, >100 sccm
	Leak Rate	Fluororubber seal: ≤4×10-10 Pam³/sHe All-metal seal: ≤1×10-12 Pam³/sHe ——All-metal seal version is not available for order when the range is ≥100 slm.
	Maximum Pressure Resistance	10bar
Environmental Conditions	Operating Temperature	0~50℃
	Operating Humidity	10%~90%R.H. (No icing, no frost)
	Operating Pressure ⁵	Controller: Maximum 6 bar (Customizable) Flow meter: 10 bar ——Operating pressure refers to the differential pressure between the inlet and outlet.
	Storage Temperature	-20~85℃
Electrical Parameters	Supply Voltage	DC24V (via side M8 connector)	DC24V (via top DB9M connector)
	Top Interface Type	RJ45 dual network port (with indicator light)	DB9M
	Side Interface Type	M8 aviation connector	RJ45 dual network port (without indicator light)
	Display Screen	Yes, located on top	No
	Communication Method	EtherCAT	RS485, 0~5V, 4~20mA
	Power Consumption	≤2.7W
	Start-up Time	≤1s
Communication Parameters	EtherCAT	Communicate through the top RJ45 interface; the device address is 1 (default)-999, It can be modified via the host computer or instructions.	No
	RS485	No	Communicate through the top DB9M interface or the side RJ45; Modbus-RTU protocol Optional; MKS protocol optional; device address is 1 (default)-99, communication rate support 9600, 19200 (default), 38400 and others, which can be modified via the top DIP switch.
	0-5V	No	Communicate through the top DB9M interface (select when ordering);
	4-20mA	No	Communicate through the top DB9M interface (select when ordering);
Mechanical parameters	Connector type	Clamp: 1/4inch, 1/2inch; VCR: 1/4inch, 1/2inch; other options available
	Gas contact Material	Fluororubber seal: 316L stainless steel, fluororubber, silicon nitride; All-metal seal: 316L stainless steel —For ranges ≥100slm, the all-metal seal version is temporarily unavailable for ordering
	Main body material	Base: 316L stainless steel Housing: Aluminum alloy
	Sealing material	FKM fluororubber or all-metal
	Weight	Controller: 0.85kg~2.8kg Flow meter: 0.80kg

Remarks

● Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25℃, 2.5bar differential pressure (3.5barA inlet, 1barA outlet), horizontal placement.

● It is recommended to install a straight pipe section of appropriate size at the inlet, otherwise it may cause deviation in accuracy.

● It is recommended to match the largest possible connectors at the inlet and outlet to avoid causing additional pressure loss.

1. The shown range is the optional range for nitrogen.

2. %F.S. refers to the percentage of error to the full scale.

3. %S.P. refers to the percentage of error to the set value.

4. Response time refers to the time required to reach within ±2% of the set value.

5. Working pressure refers to the differential pressure between the inlet and outlet.