S500系列.webp
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S500 series

Dual-screen display, supports range adjustment

Fast response, high precision

Equipped with dedicated host computer, certified product

S500 series

S500 Series

Product Specifications

Basic Parameters

Media Requirements

Clean, dry, and free of corrosive gases

Media Types

Air, nitrogen, oxygen, carbon dioxide, helium, hydrogen, methane, argon, etc.

Range 1
(Nitrogen equivalent)

(0~20, 50, 100, 200, 500) sccm
(0~1, 2, 5, 10, 20) slm
Other ranges are available, please consult for details

Accuracy

±0.3%F.S. 2 (≤30%F.S.)
±1.0%S.P. 3 (>30%F.S.)

Range Ratio

100:1

Response Time 4

≤0.5s

Repeatability

≤±0.2%F.S.

Resolution

0.001 sccm, ≤20 sccm
0.01 sccm, ≤100 sccm and >20 sccm
0.1 sccm, ≤1 slm and >100 sccm
1 sccm, >1 slm

Leak Rate

≤1×10 -10 Pam³/sHe

Maximum Pressure Resistance

9.8bar

Environmental Conditions

Operating Temperature

0~50℃

Operating Humidity

10%~90%R.H. (No icing, no frost)

Operating Pressure 5

0.5~4 bar, >2 slm
0.5~6 bar, ≤2 slm
(Specific range related)

Storage Temperature

-20~85℃

Electrical Parameters

Supply Voltage

DC24V

Power Consumption

≤4.0W

Start-up Time

≤1s

Communication Interface

Interface Type

D-SUB9、RJ45

Analog Control

0-5V or 4-20mA

Digital Control

RS485 or RS232

Digital Signal (RS485 or RS232)

Interface Type

D-SUB9 or RJ45

Communication Rate

9600, 38400, 115200 (default)

Protocol

Modbus-RTU

Device Address

1 (default)~99

Mechanical Parameters

Connector Type

Compression fitting: 1/4 inch
VCR: 1/4 inch
Other options available

Gas Contact
Material

316L stainless steel, fluororubber, silicon dioxide

Main Body Material

Base: 316L stainless steel
Housing: Aluminum alloy

Sealing Material

FKM fluororubber

Weight

0.95kg

Remarks

● Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25℃, 2.5 bar differential pressure (3.5 barA inlet, 1 barA outlet), horizontal placement.

● It is recommended to install a straight pipe section of appropriate size at the inlet, otherwise it may cause deviation in accuracy.

● It is recommended to match the largest possible connectors at the inlet and outlet to avoid causing additional pressure loss.

1. The shown range is the selectable range for nitrogen.

2. %F.S. refers to the percentage of error to the full scale.

3. %S.P. refers to the percentage of error to the setpoint.

4. Response time refers to the time required to reach within ±2% of the setpoint.

5. Operating pressure refers to the differential pressure between the inlet and outlet.

Application Areas

Semiconductor

Semiconductor

Photovoltaic

Photovoltaic

Vacuum coating

Vacuum coating

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