S500 series
Dual-screen display, supports range adjustment
Fast response, high precision
Equipped with dedicated host computer, certified product
S500 series
S500 Series

Product Specifications
|
Basic Parameters |
|
|
Media Requirements |
Clean, dry, and free of corrosive gases |
|
Media Types |
Air, nitrogen, oxygen, carbon dioxide, helium, hydrogen, methane, argon, etc. |
|
Range 1 |
(0~20, 50, 100, 200, 500) sccm |
|
Accuracy |
±0.3%F.S. 2 (≤30%F.S.) |
|
Range Ratio |
100:1 |
|
Response Time 4 |
≤0.5s |
|
Repeatability |
≤±0.2%F.S. |
|
Resolution |
0.001 sccm, ≤20 sccm |
|
Leak Rate |
≤1×10 -10 Pam³/sHe |
|
Maximum Pressure Resistance |
9.8bar |
|
Environmental Conditions |
|
|
Operating Temperature |
0~50℃ |
|
Operating Humidity |
10%~90%R.H. (No icing, no frost) |
|
Operating Pressure 5 |
0.5~4 bar, >2 slm |
|
Storage Temperature |
-20~85℃ |
|
Electrical Parameters |
|
|
Supply Voltage |
DC24V |
|
Power Consumption |
≤4.0W |
|
Start-up Time |
≤1s |
|
Communication Interface |
|
|
Interface Type |
D-SUB9、RJ45 |
|
Analog Control |
0-5V or 4-20mA |
|
Digital Control |
RS485 or RS232 |
|
Digital Signal (RS485 or RS232) |
|
|
Interface Type |
D-SUB9 or RJ45 |
|
Communication Rate |
9600, 38400, 115200 (default) |
|
Protocol |
Modbus-RTU |
|
Device Address |
1 (default)~99 |
|
Mechanical Parameters |
|
|
Connector Type |
Compression fitting: 1/4 inch |
|
Gas Contact |
316L stainless steel, fluororubber, silicon dioxide |
|
Main Body Material |
Base: 316L stainless steel |
|
Sealing Material |
FKM fluororubber |
|
Weight |
0.95kg |
Remarks
● Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25℃, 2.5 bar differential pressure (3.5 barA inlet, 1 barA outlet), horizontal placement.
● It is recommended to install a straight pipe section of appropriate size at the inlet, otherwise it may cause deviation in accuracy.
● It is recommended to match the largest possible connectors at the inlet and outlet to avoid causing additional pressure loss.
1. The shown range is the selectable range for nitrogen.
2. %F.S. refers to the percentage of error to the full scale.
3. %S.P. refers to the percentage of error to the setpoint.
4. Response time refers to the time required to reach within ±2% of the setpoint.
5. Operating pressure refers to the differential pressure between the inlet and outlet.
Application Areas
Semiconductor
Photovoltaic
Vacuum coating
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