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E series

Electromagnetic interference resistance

High precision, small size

Low temperature drift, low leakage rate

Anti-pollution, anti-dust

Fast response speed, high cost performance

E series

E Series

Product Specifications

Basic Parameters

Media Requirements

Clean, dry, and free of corrosive gases

Media Types

Air, nitrogen, oxygen, carbon dioxide, helium, hydrogen, methane, argon, etc.

Range 1
(Nitrogen equivalent)

(0~10, 20, 50, 100, 200, 500) sccm
(0~1, 2, 5, 10, 20) slm
Other ranges are available, please consult for details

Accuracy

±0.8%F.S. 2 or ±1.0%S.P. 3
Take the larger value

Range Ratio

100:1

Response Time 4

≤1s

Repeatability

≤±0.2%F.S.

Resolution

0.01 sccm, ≤100 sccm
0.1 sccm, ≤1 slm and >100 sccm
1 sccm, ≤5 slm and >1 slm
0.01 slm, >5 slm

Leak Rate

≤1×10-9 Pam³/sHe

Maximum Pressure Resistance

9.8bar

Environmental Conditions

Operating Temperature

0~50℃

Operating Humidity

10%~90%R.H. (No icing, no frost)

Operating Pressure 5

0.5~4 bar, >2 slm
0.5~6 bar, ≤2 slm
(Specific range related)

Storage Temperature

-20~85℃

Electrical Parameters

Supply Voltage

DC24V

Power Consumption

≤2.7W

Start-up Time

≤1s

Communication Interface

Interface Type

D-SUB9

Analog Control

0~5V or 4~20mA

Digital Control

RS485 or RS232

Digital Signal (RS485/RS232)

Interface Type

D-SUB9

Communication Rate

9600 (default), 14400, 19200, 38400, 56000,
57600, 115200
(Can be modified via command or host computer)

Protocol

Modbus-RTU

Device Address

1 (default)~250
(Can be modified via command or host computer)

Mechanical Parameters

Connector Type

Compression fitting: 8mm, 1/4inch, 1/8inch
Other options available

Gas Contact Material

316L stainless steel, fluororubber, silicon dioxide

Main Body Material

Base: 316L stainless steel
Housing: Aluminum alloy (E series); DT4C (E-P100 series)

Sealing Material

FKM fluororubber

Weight

0.90kg

Remarks

● Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25°C, 2.5 bar differential pressure (3.5 barA inlet, 1 barA outlet), horizontal placement.

● It is recommended to install a straight pipe section of appropriate size at the inlet, otherwise it may cause deviation in accuracy.

● It is recommended to match the largest possible connectors at the inlet and outlet to avoid causing additional pressure loss.

1. The shown range is the selectable range for nitrogen.

2. %F.S. refers to the percentage of error to the full scale.

3. %S.P. refers to the percentage of error to the setpoint.

4. Response time refers to the time required to reach within ±2% of the setpoint.

5. Operating pressure refers to the differential pressure between the inlet and outlet.

Application Areas

Crystal stove

Crystal stove

Vacuum coating

Vacuum coating

Plasma cleaner

Plasma cleaner

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