P300系列.webp
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  • P300系列.webp

P300 series

Long-term work is stable and reliable

High control precision

Good environmental adaptability

P300 series

P300 Series

Model Description

Index Parameters P300-MR P300-DR
Pressure Type Absolute Pressure
Full-Scale Control Pressure 1200mBar
Pressure Resistance 3MPa
Control Method Upstream
Full-Scale Flow Rate at Valve Port 2, 3, 5 SLM
Response Time <1s
Temperature Coefficient <0.02%FS/℃
Pressure Resolution 0.1mBar
Pressure Control Accuracy ±1%SP(≥10%FS), 0.2%FS(<10%FS)
Operating Temperature Range 10°C~50°C
Mechanical Interface 1/4 inch compression fitting, 1/4 inch VCR
Electrical Interface M8 or RJ45 dual network port (with indicator lights) RJ45 dual network port (without indicator lights) or DB9M
Communication Method RS485, EtherCAT RS485, 0~5V 1
Valve Type Normally Closed
External Leakage Rate <1×10-12 Pa m³/s (He)
Internal Leakage Rate <0.1%FS
Supply Voltage 15~24VDC

Remarks

1. The 0~5V version is not currently available for purchase. Please inquire for details.

Application Areas

Semiconductor

Semiconductor

Photovoltaic

Photovoltaic

Vacuum coating

Vacuum coating

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