Applications of gas mass flow in the laboratory industry
Release time:
13 May,2022
Summary

Company Profile
Qingdao Xinnovis Microsystem Technology Co., Ltd. is located in Laoshan District, Qingdao City, adjacent to research institutions such as Shandong University Qingdao Campus, Beihang University Qingdao Microelectronics Research Institute, and the Qingdao Institute of Energy, Chinese Academy of Sciences. It is a high-tech enterprise specializing in the development of high-end gas flow sensors and flow control instruments. The core members of the company's team come from internationally renowned MEMS research institutions such as Singapore and Belgium, and the Chinese Academy of Sciences. The company has established long-term strategic partnerships with the Singapore Agency for Science, Technology and Research's Institute of Microelectronics and the Shanghai Institute of Microsystem and Information Technology. It also maintains close cooperative relationships with Shandong University and Beihang University's Microelectronics Research Institute in the development of new sensor chips.

Qingdao Xinnovis Microsystem Technology Co., Ltd. has obtained 39 national invention patents and honorary qualifications.
Qingdao Xinnovis will continue to focus on the field of micro gas flow control, committed to providing customers with high-quality products and professional services. We strengthen management based on quality and reputation, and contribute to the development of domestic analytical instruments and semiconductor equipment.
Manufacturing and Calibration Platform
The manufacturing platform has more than 80 sets of automated sensor production and reliability testing equipment, as well as a 9000-square-meter Class 1000 cleanroom for testing and packaging. It holds quality management and manufacturing certifications such as ISO9001, ISO14001, and IATF16949.

In the calibration and adjustment process, we have multiple high-end devices, including piston standard flow devices (accuracy 0.3%), sonic nozzle standard flow devices (accuracy 0.13%), and Fluke Molbox flow equipment (accuracy 0.125%), to ensure product accuracy.


Overview: In recent years, with the continuous investment from the state in scientific research, universities, and research institutes, the demand for high-precision gas equipment has increased, leading to a growing need for precise measurement and control of gas flow. Based on its unique Microelectromechanical Systems (MEMS) technology, Qingdao Xinnovis has launched a series of high-performance mass flow meters (MFM) and mass flow controllers (MFC) for laboratory applications.
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PART01
Classification of Commonly Used Gases in Laboratories
I Classification by Application
1. Energy and Power Gases. In laboratories, some gases are used to provide energy, such as natural gas, coal gas, liquefied petroleum gas, hydrogen, and acetylene; others provide power, such as compressed air and nitrogen.
2. Raw Materials for Experiments. Some gases are commonly used in laboratories as raw materials for experiments, such as chlorine, nitric oxide, oxygen, and hydrogen used in chemical reaction experiments.
3. Gases for Auxiliary Use in Experimental Instruments. Some experiments or instruments in the laboratory require high-purity protective gases, such as high-purity non-flammable gases (nitrogen, carbon dioxide), inert gases (helium, argon), flammable gases (hydrogen, acetylene), and combustion-supporting gases (oxygen) used in precision instruments such as gas chromatography, gas chromatography-mass spectrometry, atomic absorption, and ICP.
II. Classification by Chemical Properties
1. Toxic and Harmful Gases. These gases have strong toxicity or corrosiveness; entering the human body can cause poisoning, burns, or even death, such as chlorine and ammonia.
2. Flammable and Explosive Gases. These gases are easily combustible and have a chemical explosion hazard, such as hydrogen and acetylene. Some flammable and explosive gases are also toxic.
3. Combustion-Supporting Gases. These gases support combustion but do not burn themselves. Their presence increases the risk of fire, such as oxygen.
4. Other Gases. Gases that do not have the above three properties, such as inert gases and carbon dioxide.

PART02
General Gas Supply for Conventional Analytical Laboratory Instruments
Gas Chromatography : H2 N2 He Air
Liquid Chromatography-Mass Spectrometry: N2 CDA
Atomic Absorption : Flame method: Air + C2H2 / N2O + C2H2 Graphite furnace method: Ar + O2 / Ar + Air
VOC Detection : Air Ar He
ICP-MS : (N2) Ar Air (He)
Liquid Chromatography-Mass Spectrometry : N2
X-ray Fluorescence Spectrometer : Ar/CH4 He
Inductively Coupled Plasma Emission Spectrometry : N2 Ar
Elemental Analyzer : O2 He
Carbon-Sulfur Analyzer : O2 N2
Mercury Analyzer : Ar Air
Sulfur Analyzer : O2
Calorimeter : O2
Ion Mass Spectrometry : He Ion Chromatography : N2
Quadrupole and TFO : He
Bioreactor Air CO2 O2 N2
Triple quadrupole N2 H2
Supercritical fluid extraction CO2
Microwave polytypic synthesis N2 Ar
Nuclear Magnetic Resonance Spectrometer N2 CDA He
Chemical synthesis CDA
Sphere ore group reduction-expansion testing instrument N2 Coal gas LPG (large flow rate, the main pipe should use at least 3/8”)
Solar cell reaction gas Ar N2 He NH3 CF4 N2O H2 SiH4
SiH2CL2 SiH2CL3 SiHCL4 etc.

Qingdao Xinnovis MFM-50 series gas mass flow meters are specifically designed for high-precision measurement of gas flow. This series of flow meters uses industry-leading flow sensing chips, combined with aviation aluminum polished gas flow path design, and the company's core calibration and compensation algorithm to achieve high-precision flow measurement of various clean, dry, and non-corrosive gases. The typical accuracy of this product is 1% within 20 SLM and 1.5% for 50 SLM, and the range ratio is better than 100:1. The range of this series of products is selectable from 100 SCCM to 800 SLM (other ranges can be customized), and it is equipped with LCD display, digital and analog output, which is convenient for users to debug on-site and remotely. This product is low cost, easy to install, and does not require additional temperature and pressure compensation, suitable for inert gas metering in the laboratory industry.
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Tel: 400 006 6550
Office Address: 12F, Building I, International Innovation Park,
177 Songling Road, Laoshan District, Qingdao, Shandong, China