A major advantage of semiconductor gas flow controllers and quality flow meters is the specific data detected.
Release time：
08 Mar,2023
Summary
The key difference between a semiconductor gas flow controller and a flow meter is that the gas mass flow controller can adjust the process flow through its own valve using a PID control program, automatically adjusting and controlling the valve opening to achieve control of the gas mass flow. The gas mass flow meter mainly uses a sensor to sense the flow rate of the gas and outputs it to a data acquisition terminal. The biggest advantage of semiconductor gas flow controllers and mass flow meters is that the specific data detected is not affected by temperature and pressure, and users do not need to perform temperature and pressure compensation calculations.
A mass flow controller (MFC) consists of a flow sensor, a flow path, a flow control valve, and an amplifier control board. The gas flow sensor uses a thermal anemometry principle to accurately measure the mass flow of gas (no temperature and pressure compensation required). The flow data signal measured by the heated bridge circuit of the sensor is sent to the amplifier for amplification. After amplification, the flow detection voltage is compared with the set voltage, and then the error signal is amplified to control the regulating valve, and the closed-loop control system adjusts the flow through the channel to match the set flow. The flow path determines the flow in the main channel. The flow display meter matched with the mass flow controller is equipped with an adjustable regulated power supply and data voltage.
LF series gas mass flow controllers and mass flow meters are mainly used in: diffusion, oxidation, molecular beam epitaxy, CVD, plasma etching, magnetron sputtering, dry etching, vacuum coating equipment, micro-reaction devices, gas mixing and distribution systems, and other production equipment, and are widely used in petrochemical equipment, pharmaceuticals, and metallurgy industries.
50Bar and 100Bar flow controllers are mostly semiconductor gas flow controllers. Semiconductor gas flow controllers use the thermal diffusion coefficient principle, which is a technology with excellent performance and high reliability in harsh environments. Semiconductor gas flow controllers have two temperature sensors placed in the medium. One sensor is heated to a temperature above the ambient temperature, and the other sensor is used to sense the temperature of the medium.
When selecting semiconductor gas flow controllers and flow meters, sales representatives of measurement and control technology semiconductor gas flow controllers, thermal gas mass flow meters, gas dynamic mixing equipment, dynamic gas distribution equipment, liquid measurement and control products, MFC, MFM, gas-liquid non-standard products, gas supply pipeline supporting construction equipment, gas mixing equipment, dynamic gas distribution equipment, gas mixers, gas concentration dilution equipment, and gas supply pipeline supporting construction often follow up and communicate with customers regarding pressure rating issues. Semiconductor gas flow controllers can measure and control the mass flow and standard state flow of various gases. The main advantages of the product are that no temperature and pressure compensation is required, the detection accuracy is high, and the response time is fast. So, does the pressure rating affect the MFC?
Currently, the pressure resistance of semiconductor gas flow controllers on the market is mainly divided into: 10Bar, 50Bar, and 100Bar. 10Bar flow controllers are mostly differential pressure (also known as throttle valve) flow meters, which are based on the throttle valve principle of fluid motion and use the pressure difference generated when liquid flows through the throttle device to achieve flow detection.
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