MFC-E Mass Flow Controller Economic-cost and Smart
- Details description
- 商品名称: MFC-E Mass Flow Controller Economic-cost and Smart
- 商品编号: MFC-E series
- Mass Flow Controller)
Technical specifications Gas requirements Clean, dry and no-corrosive gas Gas air、N2、Ar、CO2,He, H2,CH4, O2 and so on Flow range
(0～10, 100, 200, 300, 500) SCCM(0～1, 2, 3, 5, 10，20) SLM
Accuracy 0.8%F.S. or 1.0%S.P, which is larger Turndown ratio 100:1 Leak integrity, outboard 1×10-9 Pa m3/s He Response time ≤0.5S Repeatability ±0.2%F.S Max Pressure 9.8 bar Environment conditions Operating temperature 0~50℃ Operating humidity 10%~90%RH（No frozen and condensation） Operation pressure
≥ 2slpm, 0.5~4 bar＜ 2slpm , 0.5~6 bar
Storage temperature -20~85℃ Electrical specifications Power supply DC24V, ripple wave≤50mV Power dissipation ＜4W Settling time (in control, typical) <1s Electrical connection Interface type D-SUB9 Analog control 0~5V、4~20mA Digital control RS485 Digital code (RS485) Interface type D-SUB9、RJ45 Communication rate
4800, 9600(default), 14400, 19200, 38400, 56000, 57600, 115200, 128000, 230400, 256000, 460800, 500000(can be modified by instruction or host computer)
Modbus RS485(Default is Modbus-RTU，can be customized) IP
1(default)~250(can be modified by instruction or host computer)
Nodes 250 Mechanical parts Fitting type
Quick coupler：6mm, 8mm(other types can be optional)
Chip material Silicon, silicon nitride, silicon carbide, etc Body material
Seat：316L stainless steelShell：carbon steel
Sealing FKM Weight 0.75kg
MFM-500 series mass flow meter are specially designed for high accuracy measurement of gas flow rate which adopts advanced industrial flow sensor chip and aero aluminum flow channel. Combined with Xinnovis calibration and compensation calculation method, MFM-500 can realize high precision measurement of clean, dry and non-corrosive gas. The accuracy is 1.5 % at or less than 200 SLPM and 1.5 % above 200 SLPM and turndown ratio is better than 100: 1. The flow range of this series is from 0.2SCCM to 8 0 0 SLM (other flow ranges are available for customized consultation). With large LCD display, digital and analog output, MFM-500 can be applied in indoor and remote test. The products are low cost, easy to install and no need of additional thermal and pressure compensation.
MFC-UT (Mass Flow Controller) series products are integrated and compact, which are based on the advanced industrial flow sensor chip, combined with high-speed digital processing technology and intelligent compensation algorithm. This series product constructed with high-end electromagnetic proportional valve, aviation aluminum alloy gas seat, high accuracy microelectromechanical chips. Compared with traditional mass flow controller, MFC-UT products are with integrated designing, which make the product greatly compact and can be installed in small space and portable devices. This series products are better suitable for limit space installation devices.
MFC-E (Mass Flow Controller) series products are specially developed for gas analyzer, mass spectrometer, gas distributor and other industries. The product mainly constructed with high accuracy flow sensor, high-end electromagnetic proportional valve, 316 L stainless steel gas seat. MFC-E series are with high accuracy, quick reaction and outstanding stability. Also easy operation, no need for temperature compensation, insensitive to pressure. Input and control signal includes: 0-5 V analog signal and R S 4 8 5 communication formula.
MFC-S500 digital mass flow controllers are developed with advanced industrial flow sensor chip (with patent), combined with low gas loss circuit structure, high accuracy digital control circuit and algorithm. This digital mass flow meter can achieve high accuracy, high stability and wide range controlling ratio in a wide temperature range. MFC-S500 constructed with digital screen and independent power supply interface, perfect for semiconductor, vacuum coating, photovoltaic and other applications.
Qingdao Xinnovis Microsystem Technology Co., Ltd.
Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.