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MFC-E series

MFC-E Mass Flow Controller Economic-cost and Smart

PRODUCT OVERVIEW

MFC-E (Mass Flow Controller) series products are specially developed for gas analyzer, mass spectrometer, gas distributor and other industries. The product mainly constructed with high accuracy flow sensor, high-end electromagnetic proportional valve, 316 L stainless steel gas seat. MFC-E series are with high accuracy, quick reaction and outstanding stability. Also easy operation, no need for temperature compensation, insensitive to pressure. Input and control signal includes: 0-5 V analog signal and R S 4 8 5 communication formula.
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  • Details description
  • Specifications
  • Applications
    • 商品名称: MFC-E Mass Flow Controller Economic-cost and Smart
    • 商品编号: MFC-E series

    MFC-E (Mass Flow Controller) series products are specially developed for gas analyzer, mass spectrometer, gas distributor and other industries. The product mainly constructed with high accuracy flow sensor, high-end electromagnetic proportional valve, 316 L stainless steel gas seat. MFC-E series are with high accuracy, quick reaction and outstanding stability. Also easy operation, no need for temperature compensation, insensitive to pressure. Input and control signal includes: 0-5 V analog signal and R S 4 8 5 communication formula.

     

     

    • Mass Flow Controller)
    • MFC
  • Technical specifications
    Gas requirements Clean, dry and no-corrosive gas
    Gas airN2ArCO2,He, H2,CH4, O2 and so on
    Flow range

    (010, 100, 200, 300, 500) SCCM

    (01, 2, 3, 5, 1020) SLM
    Accuracy 0.8%F.S. or 1.0%S.P, which is larger
    Turndown ratio 100:1
    Leak integrity, outboard 1×10-9 Pa m3/s He
    Response time ≤0.5S
    Repeatability ±0.2%F.S
    Max Pressure 9.8 bar
    Environment conditions
    Operating temperature 0~50
    Operating humidity 10%~90%RHNo frozen and condensation
    Operation pressure

    ≥ 2slpm, 0.5~4 bar

    2slpm , 0.5~6 bar
    Storage temperature -20~85
    Electrical specifications
    Power supply DC24V, ripple wave≤50mV
    Power dissipation 4W
    Settling time (in control, typical) <1s
    Electrical connection
    Interface type D-SUB9
    Analog control 0~5V4~20mA
    Digital control RS485
    Digital code (RS485)
    Interface type D-SUB9RJ45
    Communication rate

    4800, 9600(default), 14400, 19200, 38400, 56000, 57600, 115200, 128000, 230400, 256000, 460800, 500000

    (can be modified by instruction or host computer)
    Modbus RS485(Default is Modbus-RTUcan be customized)
    IP

    1(default)~250

    (can be modified by instruction or host computer)
    Nodes 250
    Mechanical parts
    Fitting type

    Tube: 8mm12mm3/8inch

    Quick coupler6mm, 8mm

    (other types can be optional)
    Chip material Silicon, silicon nitride, silicon carbide, etc
    Body material

    Seat316L stainless steel

    Shellcarbon steel
    Sealing FKM
    Weight 0.75kg

     

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Qingdao Xinnovis Microsystem Technology Co., Ltd.

Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.

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TEL: 400 006 6550

E-mail:service@xinnovis.com

ADDRESS: B2-1, 12th Floor, Block B, International Innovation Park, No. 169 Songling Road, Laoshan District, Qingdao

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