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MFM-50

MFM Mass Flow Meter Explosion-proof

PRODUCT OVERVIEW

MFM-500 series mass flow meter are specially designed for high accuracy measurement of gas flow rate which adopts advanced industrial flow sensor chip and aero aluminum flow channel. Combined with Xinnovis calibration and compensation calculation method, MFM-500 can realize high precision measurement of clean, dry and non-corrosive gas. The accuracy is 1.5 % at or less than 200 SLPM and 1.5 % above 200 SLPM and turndown ratio is better than 100: 1. The flow range of this series is from 0.2SCCM to 8 0 0 SLM (other flow ranges are available for customized consultation). With large LCD display, digital and analog output, MFM-500 can be applied in indoor and remote test. The products are low cost, easy to install and no need of additional thermal and pressure compensation.
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  • Details description
  • Specifications
  • Applications
    • 商品名称: MFM Mass Flow Meter Explosion-proof
    • 商品编号: MFM-50
    • 列表页描述:

    MFM-500 series mass flow meter are specially designed for high accuracy measurement of gas flow rate which adopts advanced industrial flow sensor chip and aero aluminum flow channel. Combined with Xinnovis calibration and compensation calculation method, MFM-500 can realize high precision measurement of clean, dry and non-corrosive gas. The accuracy is 1.5 % at or less than 200 SLPM and 1.5 % above 200 SLPM and turndown ratio is better than 100: 1. The flow range of this series is from 0.2SCCM to 8 0 0 SLM (other flow ranges are available for customized consultation). With large LCD display, digital and analog output, MFM-500 can be applied in indoor and remote test. The products are low cost, easy to install and no need of additional thermal and pressure compensation.

  • Technical specifications

    Gas requirements

    Clean, dry and no-corrosive gas

    Gases

    airN2ArCO2,He, H2,CH4, O2 and so on

    Flow range

    (010, 100, 200, 300, 500) SCCM

    (0~1, 5, 10, 50, 100, 200, 500, 800) SLM

    (based on N2)

    Accuracy

    ≤ 200slpm, 1.5%F.S.

    200slpm, 2.0%F.S.

    Turndown ratio

    100:1

    Leak integrity, outboard

    1×10-9 Pa m3/s He

    Response time

    ≤0.5S (can be adjusted according to need)

    Flow pressure loss

    ≤100Pa

    Repeatability

    ±0.2%F.S

    Max Pressure

    1.2MPa

    Environment Conditions

    Operating temperature

    0~50

    Operating humidity

    10%~90%RHNo frozen and condensation

    Operation pressure

    0~1MPa (suggest 0~0.3MPa)

    Storage temperature  

    -20~85

    Electrical specifications

    Power supply

    DC8V, ripple wave≤50mV

    Power dissipation

    240mW

    Settling time (in control, typical)

    <1s

    Electrical connection

    Interface type

    7 pin aviation plug

    Analog control

    4~20mA(optional)

     Digital control

    RS485

    Digital code (RS485)

    Interface type

    7 pin aviation plug

    Communication rate

    9600

    Modbus

    RS485(Default is Modbus-RTUcan be customized)

     IP

    1(default)~250

    (can be modified by instruction or host computer)

    Nodes

    250

    Mechanical parts

    Fitting type

    Tube: 8mm12mm3/8inch

    Quick coupler6mm, 8mm

    (other types can be optional)

    Chip material

    Silicon, silicon nitride, silicon carbide, etc

    Body material

    Seataero aluminum

    Shellcarbon steel

    Sealing

    FKM

    Weight

    0.30kg


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Qingdao Xinnovis Microsystem Technology Co., Ltd.

Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.

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TEL: 400 006 6550

E-mail:service@xinnovis.com

ADDRESS: B2-1, 12th Floor, Block B, International Innovation Park, No. 169 Songling Road, Laoshan District, Qingdao

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