Small size, big energy!
Release time：
20 Mar,2024
Summary
A thermal flow sensor is a sensor based on the principle of fluid heat transfer. It is widely used in various gas flow measurements and has the advantages of high accuracy, good stability, and high reliability.
Currently, there are two main solutions for thermal flow sensors: one is a capillary flow sensor, which requires winding a resistance wire on a capillary with an inner diameter of several millimeters. This scheme is complex to process and has a large thermal capacity, resulting in a slow response speed; the other is the current mainstream MEMS chip flow sensor. This scheme uses MEMS technology to fabricate micrometer-level Heater and detection units on a silicon substrate, using the heat exchange between the fluid and the chip to measure the mass flow rate. The working principle is shown in the figure:
Compared to the large size of the capillary, the size of the MEMS chip is only millimeters (the size of the second-generation MEMS chip from Qingdao Xinsheng is 3mm × 1mm, and its core sensitive area is only 0.8mm × 0.4mm). Due to its small thermal capacity, it can achieve a faster response speed. The following figure shows a comparison of the response times of capillary flow meters and MEMS chip flow meters:
In addition, thanks to its small size and high integration, the MEMS chip flow sensor also has the advantages of high sensitivity, high signal-to-noise ratio, large range ratio, high consistency, and high reliability. It truly embodies the concept of "small size, great power"!
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