Advantages and market applications of MEMS sensors: mass flow meters


2022-02-24 19:54

MEMS is a microelectromechanical system, also known as MicroElectromechanical System,. It refers to sensor devices with dimensions ranging from a few millimeters to even smaller, and their internal structure is generally in the micrometer or even nanometer scale, making them an independent intelligent system. Simply put, MEMS is a silicon-based sensor that miniaturizes the mechanical components of traditional sensors and uses 3D stacking technology, such as 3D silicon perforated TSV, to fix the device onto a wafer. Finally, it adopts a specially customized packaging form according to different application scenarios, and is cut and assembled. Benefiting from the cost advantage of mass production of IC silicon wafers that ordinary sensors cannot achieve, MEMS also possesses miniaturization and high integration that ordinary sensors cannot.

MEMS mainly involves microfabrication technology, mechanics/solid acoustic theory, heat flow theory, electronics, biology, and so on. The characteristic length of MEMS devices ranges from 1 millimeter to 1 micrometer, compared to a hair diameter of approximately 50 micrometers.

The main advantages of MEMS sensors are small size, light weight, low power consumption, high reliability, high sensitivity, and easy integration. They are the main force of micro sensors and are gradually replacing traditional mechanical sensors. They have been studied in almost all fields, including consumer electronics, automotive industry, and even aerospace, mechanical, chemical, and pharmaceutical fields.

2 、MEMS is the only choice to replace traditional sensors

The constant pursuit of the development of all modern industries is from analog to digital, from large volume to miniaturization, and the accompanying high integration. MEMS is seen as the only possible alternative to sensors, and may also be one of the main choices for constructing sensing layer sensors in the future Internet of Things. It has the following advantages:

Advantage 1: Miniaturization


MEMS devices have a small volume, and the size of a single MEMS sensor is generally measured in millimeters or even micrometers, with light weight and low energy consumption. At the same time, miniaturized mechanical components have advantages such as small inertia, high resonance frequency, and short response time. A higher surface volume ratio in MEMS can enhance the sensitivity of surface sensors.

Advantage 2: Mass production


Taking a single 5mm * 5mm MEMS sensor as an example, using silicon microfabrication technology on an 8-inch silicon wafer can simultaneously cut approximately 1000 MEMS chips. Mass production can greatly reduce the production cost of a single MEMS.

Advantage 3: Integration


Generally speaking, a single MEMS often integrates an ASIC chip while encapsulating mechanical sensors, controlling the MEMS chip and converting analog signals into digital outputs. The integration of microsensors, micro actuators, and microelectronic devices can manufacture MEMS with high reliability and stability. With the development of MEMS technology, there is now a tendency to integrate more functions into a single MEMS chip to achieve higher integration.

Advantage four: interdisciplinary intersection


MEMS involves various disciplines such as electronics, mechanics, materials, manufacturing, information and automation, physics, chemistry, and biology, and integrates many cutting-edge achievements in today's scientific and technological development. MEMS is one of the most important choices for building physical perception layer sensors for the Internet of Things.

Due to the sensitivity of the Internet of Things, especially wireless sensor networks, to the physical size, power consumption, cost, and other factors of devices, the miniaturization of sensors is crucial for the development of the Internet of Things industry. The MEMS microelectromechanical system combines and is compatible with traditional semiconductor processes, using micrometer technology to manufacture micro machinery on chips and integrating it with corresponding circuits into a whole technology. It is developed based on semiconductor manufacturing technology, and mass production can meet the huge demand and low-cost requirements of the Internet of Things for sensors.

The scale of problems in the domestic MEMS industry is relatively small, but there is great potential for development in terms of market size. Faced with the huge domestic consumer electronics market, self-produced and self sold products can meet the needs of some mid to low end markets in China, which is also a shortcut for Fabless in China. Chinese MEMS design enterprises are mainly concentrated in the East China region, accounting for about 55% of the total number of enterprises in the country, with Shanghai, Suzhou, and Wuxi as the industrial concentration areas.

From a market perspective, China has the world's largest integrated circuit market, and with the catalysis of the Internet of Things, the demand for MEMS devices such as accelerometers, high-precision pressure sensors, silicon microphones, gyroscopes, RF instruments, gas sensors, electronic compasses, etc. in the domestic market is becoming increasingly urgent.

From a market perspective, China has the world's largest integrated circuit market, and with the catalysis of the Internet of Things, the demand for MEMS devices such as accelerometers, high-precision pressure sensors, silicon microphones, gyroscopes, RF instruments, gas sensors, electronic compasses, etc. in the domestic market is becoming increasingly urgent.

The Qingdao Xinsheng MFM-50 series gas mass flowmeter is specifically designed for high-precision measurement of gas flow rate. This series of flow meters adopts advanced flow sensing chips in the industry, combined with aviation aluminum polishing gas flow channel design, combined with the company's core calibration and compensation algorithms, to achieve high-precision flow measurement for various clean, dry, and non corrosive gases. The typical accuracy of this product is 1% within 20 S L M and 1% within 50 S L M 5%, with a range ratio better than 100: 1. The range of this series of products ranges from 100 S CC M to 800 S L M (other ranges can be customized), and is equipped with LCD screen display, digital and analog outputs for easy on-site and remote debugging by users. This product has low cost, is easy to install, and does not require additional temperature and pressure compensation.


Qingdao Xinnovis Microsystem Technology Co., Ltd.

Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.



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