Qingdao Xinnovis Microsystem Technology Co., Ltd., as an innovative model in the field of core components of the semiconductor industry, is incubated and established based on the profound scientific research foundation of Shandong University. Driven by breakthrough technological research and development, it focuses on the industrialization and application of advanced industrial sensor chips and system integration technologies. The company has built a complete product matrix covering key basic components of the semiconductor industry chain, including high-performance gas mass flow meters/controllers, thin-film vacuum gauges, and pressure controllers. It has successfully been selected as a national high-tech enterprise and a Shandong Province specialized, refined, and new enterprise, building a three-in-one innovation development model of "independent innovation + industry-university-research cooperation + industrial integration".
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Qingdao Xinnovis Microsystem Technology Co.,Ltd.
Qingdao Xinnovis Microsystem Technology Co., Ltd., as a revolutionary model in the field of core components of the semiconductor industry, is incubated and established based on the profound scientific research foundation of Shandong University. Driven by breakthrough technological research and development, it focuses on the industrial application of advanced industrial sensor chips and system integration technologies. The company has built a complete product matrix covering key basic components of the semiconductor industry chain, including high-performance gas mass flow meters/controllers, thin-film vacuum gauges, and pressure controllers. It has successfully been selected as a national high-tech enterprise and a Shandong Province specialized, refined, and new enterprise, building a "self-innovation + industry-university-research cooperation + industrial integration" three-in-one innovation development model. In terms of technological breakthroughs, Qingdao Xinnovis has undertaken 2 national major R&D plan projects and 1 major innovation project of Shandong Province, and has applied for more than 60 invention patents, forming a technology system with independent intellectual property rights. Its R&D team brings together experienced experts from world-leading scientific research institutions such as the Institute of Microelectronics (IME) in Singapore and Karlsruhe Institute of Technology (KIT) in Germany, as well as excellent universities in China such as Shandong University, the Chinese Academy of Sciences, and Tsinghua University, giving full play to the advantages of overseas advanced technology and local industrialization dual-track talent structure.
Qingdao Xinnovis not only leads the world in applying MEMS flow chip technology to the semiconductor manufacturing field, but also has become an industry-leading technology company that independently manages the entire industry chain from chip design and core component R&D to intelligent instrument system integration. This vertical integration capability enables the company to break through the "Achilles' heel" of key components of semiconductor equipment, and its innovative achievements can provide key technological support for the independent and controllable development of domestic semiconductor equipment. As an important innovation carrier of the national semiconductor industry strategy, Qingdao Xinnovis is committed to breaking through the technological barriers of key links in the semiconductor industry chain through continuous technological iteration and industrial application, and using independent and controllable core technologies to help the semiconductor industry achieve leapfrog development.
Tao Jifang
Chairman of Qingdao Xinsheng
Founder and General Manager of Qingdao Xinnovis Microsystem Technology Co., Ltd.
Shandong Taishan Scholar, Qilu Youth Scholar
Main Education and Work Experience:
>2018-present Shandong University
Professor, Doctoral Supervisor, Director of the Department of Electronics
>2014-2018 Institute of Microelectronics, Singapore
Second-level Researcher
>2013-2014 Goertek Central Research Institute
Senior Engineer, VP Assistant
>2012-2013 Nanyang Technological University, Singapore
Postdoctoral Fellow
>2008-2012 Nanyang Technological University, Singapore
PhD (Joint Training)
>2007-2012 Beijing University of Posts and Telecommunications (Joint Training with Nanyang Technological University)
PhD
>Research areas: intelligent sensors, nano silicon photonics, nanooptomechanics, etc.;
>Innovative achievements: presided over and participated in national key research and development projects,"Nuclear High Base" national major scientific and technological projects, military commission equipment development department pre-research projects, etc., as well as joint technological research topics with German Bosch, Taihe shares and other enterprises, published more than 60 professional academic papers, 12 international patents, and 18 Chinese invention patents;
>Director of Shandong Provincial "Advanced Sensor Joint Laboratory", group leader of the guideline writing group for the Shandong Provincial Major Scientific and Technological Innovation Project "Advanced Sensor", evaluator of the National Key Research and Development Plan, and chief scientist of the Military Science and Technology 173 Key Fund.
Development History
MEMS vacuum gauge
All-metal sealed MFC S700 Gas control and measurement system solutions
2023
Development of high-reliability, corrosion-resistant MEMS flow chips
S500 series semiconductor-grade MFC Electronic pressure controller Proportional valve development: 50-500L/min range
2022
Development of high-precision MEMS vacuum sensors
0-800slm flow meter 0-10slm MFC MFM: 50, T series MFC: E, T, UT series
2021
Mass production of gas flow sensor chips
0-250slm flow meter 0-1slm MFC Miniature digital anemometer
2020
Technical accumulation
National project support (total investment exceeding 75 million RMB) Singapore Agency for Science, Technology and Research (A*STAR) key project National key research and development plan GF equipment and commissioning pre-research project Shandong Provincial Major Innovation Project Shandong Provincial Taishan Scholar Fund
2014-2019
XINNOVIS Global
R&D and production base
R&D and production area
Service Center
Qingdao Xinnovis has multiple subsidiaries and offices in Shanghai, Suzhou, Shenzhen, Fuzhou and other places.
Tel: 400 006 6550
Office Address: 12F, Building I, International Innovation Park,
177 Songling Road, Laoshan District, Qingdao, Shandong, China