Qingdao Xinnovis launched a series of gas mass flow meters and controllers.
Release time：
07 Mar,2022
Summary
Qingdao Xinnovis recently launched a series of gas mass flow meters and mass flow controllers, successfully integrating core technologies from MEMS chips to flow detection instruments and algorithms. It has become one of the few high-tech companies in Qingdao that master core MEMS chip technology.
According to MEMS Consulting reports, Qingdao Xinnovis Microsystem Technology Co., Ltd. (Chinese abbreviation: Qingdao Xinnovis, English abbreviation: Xinnovis) focuses on the research and development and production of micro gas flow measurement and control products. Recently, Qingdao Xinnovis has developed a next-generation high-performance gas mass flow meter product using an industrial-grade MEMS flow sensor solution, mainly targeting application markets such as analytical instruments, laboratories, hydrogen energy, and vacuum coating.
Figure 1 Qingdao Xinnovis S500 series gas mass flow controller (left) and MFM-50 series gas mass flow meter (right)
With the country's emphasis on and support for domestic instruments and semiconductor equipment, the domestic analytical instrument industry and semiconductor equipment industry have achieved rapid development. As core components of analytical instruments and semiconductor equipment, gas mass flow meters/controllers are still mainly imported, and the demand for domestic substitution is urgent. Unlike traditional volume flow meters based on differential pressure and vortex street principles, MEMS gas mass flow meters use thermal conductivity to accurately measure gas mass flow. This type of product is not affected by environmental parameters such as temperature and pressure, making it the most widely used high-precision micro gas flow measurement and control technology globally.
Qingdao Xinnovis MFM-50 series gas mass flow meter It adopts an aviation-grade aluminum alloy base and Exia IIC T4 Ga intrinsically safe explosion-proof design. It features high accuracy (minimum 0.5%), wide turndown ratio (500:1), fast response speed (fastest 15ms), low temperature drift (0.01% F.S./℃), high cost performance, and integrated design. It is suitable for laboratory safe gas modification, hydrogen energy, biopharmaceuticals, brazing, and other industries.
Qingdao Xinnovis S500 series gas mass flow controller It features a unique gas flow path design, enabling flexible split ratio configuration. The range covers 1sccm~120slm, with a minimum control accuracy of 0.1sccm, and the drift amount is only 0.4~0.6% within the 0~50℃ temperature range. In terms of electrical signals, it provides multiple digital and analog control methods and is equipped with an industrial-grade display for convenient on-site debugging and configuration by customers.
Qingdao Xinnovis WIN M/S series miniature digital anemometer This is a domestically pioneering product, adopting an economical and compact packaging method. It integrates temperature and wind speed measurement within an 8.5mm x 6mm x 3.3mm package. This product can be integrated into equipment such as air conditioners, fresh air systems, explosion-proof cabinets, and fume hoods, achieving wind speed measurement up to 25m/s with a high resolution of 0.02m/s.
"Although the company was only established in 2020, we have been conducting preliminary research and development in MEMS flow sensor chips for more than eight years." Dr. Tao Jifang, founder of Qingdao Xinnovis, introduced, "Currently, the company has gradually entered the fast lane of development. After the products were put on the market, they have been recognized by a large number of customers, including many large listed companies. The company will continue to increase investment and focus more on the micro gas flow measurement and control segment, aiming to become a core component supplier in the semiconductor and gas analyzer fields."
About Qingdao Xinnovis
Located in Laoshan District, Qingdao City, Qingdao Xinnovis is adjacent to research institutions such as Shandong University Qingdao Campus, Beihang University Qingdao Microelectronics Research Institute, and the Chinese Academy of Sciences Qingdao Institute of Energy. It is a high-tech enterprise specializing in the development of high-end gas flow sensors and flow measurement and control instruments. The core members of the company's team come from internationally renowned MEMS research institutions such as Singapore, Belgium, and the Chinese Academy of Sciences.
After two years of hard work, the company has developed a number of products, including miniature digital anemometers, gas mass flow meters, and mass flow controllers, all of which have entered the mass production stage. The company will continue to focus on the field of micro gas flow measurement and control, creating world-class gas mass flow meters and controllers, and is committed to providing customers with high-quality products and professional services to jointly promote the development of domestic analytical instruments and semiconductor equipment.
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Tel: 400 006 6550
Office Address: 12F, Building I, International Innovation Park,
177 Songling Road, Laoshan District, Qingdao, Shandong, China